Scripts - Reference

Summary:

Basics of Scripts, and reference details for the ProSEM classes and functions available in scripts, as well as the common libraries that are included with the ProSEM Python instance.

Jump to: Properties: Project, Image, Group, Gratings, Arrays, Generic to All Measurements, Line/Space, Circle/Ellipse, Rectangle, Triangle, SingleEdge, Shape, Multi-Edge

Included Libraries

In addition to the Python Standard Library, ProSEM also includes several useful libraries.
(Links open documentation pages for each library in a new browser window.)

Library Name	Description
dateutil	Extended parsing and processing of date and time strings
matplotlib & mpl_toolkits	Draw many types of plots, with extensive controls & options
numpy	Numerical processing library
PIL (Python Imaging Library)	Image processing library
wx	GUI widgets toolkit, for dialogs for user input in scripts
xlsxwriter	For writing Excel format files in the .xlsx format
xlwt	For writing older format Excel files in the .xls file format

Metrology Classes

Measurements must be an instance of one of these classes:

GMetrologyLinesSpaces
GMetrologyCircle
GMetrologyEllipse
GMetrologyRectangle
GMetrologyTriangle
GMetrologyShape
GMetrologySingleEdge
GMetrologyMultiEdge

The Python isinstanceof(object,type) function can be used to test for an object type. Example:

Example to test if item is a Lines&Spaces measurement: if (isinstance(item,GMetrologyLinesSpaces)):

Accessing Measurement Data, Properties and Functions

When writing scripts for ProSEM, context is key; specifically, all measurement data in ProSEM is stored in a hierarchy, and thus must be accessed within that hierarchy.

ProSEM Project --> Image(s) --> Group(s) --> Measurement(s)

Data Hierarchy Diagram

Items can be accessed by index, starting from 0. Some examples:

prosem[0] the first image in a project
prosem[2][1] the second group in the third image in the project
prosem[1][0][4] the fifth measurement in the first group in the second image

so any attribute of an item is available:

prosem.base C:\Users\me\Documents\

prosem[0].file C:\Users\me\Documents\AB0223.tif full path of the first image in the project
prosem[0].label AB0223 the label of the first image in ProSEM (filename modified as needed so that it can be used as a property name.

prosem[1][2].label Rectangles the name of the third group in the second image in this project

If it is necessary to find the index of an object by a property value, this code is useful:

imageName = 'PhotXtal_1' # find the index of the image with this namecontext = prosem # by looking in the projectindex = next((i for i, item in enumerate(context) if item.label == imageName),ValueError)if (index == ValueError): print('Error: item label not found in project.')else:
...

Or to find the index of the group named 'Circles & Ellipses' in an image:

context = prosem[2] # search in the third image in the projectgroupName = 'Circles & Ellipses' # for the index of the group of Circles & Ellipses index = next((i for i, item in enumerate(context) if item.label == groupName),ValueError)

print(prosem[2][index][0].MajorDiameter)
251.548

Note that in both examples, it is important to check that the index is valid, that is, that the item sought actually exists, by checking that the return is not ValueError.

Project Properties, Functions, and Methods

Examples here assume a ProSEM project, ie a GProSEM object is instanced with the name prosem

Name	Kind	Description	Example Example Result	Notes
len	Function	Count of images in the project	`len(prosem)` 3	There are three images in this project
file	Attribute	Full path of the ProSEM project file	`prosem.file` C:\Users\me\Documents\Example.iab	The full path of the project file. Within a script called from interactive ProSEM, this is the temporary project passed to ProSEM, not the project open in the interactive ProSEM instance.
base	Attribute	The directory where the currently loaded project resides	`prosem.base` C:\Users\me\Documents\	Similar to file (above), but only the path, without the project filename,
MeasurementUnit	Attribute	User units of the current project, either 'nm' or 'um'	`prosem.MeasurementUnit` nm	Possible values are: nm (nanometers) um (microns) (note this is a u character, not a Greek mu character)
version	Attribute	Version number of ProSEM	`prosem.version` v2.8.3
load_project(path)	Method	Loads a project from a file	`prosem.load_project("/home/dir/name.iab")` Loads this project into the ProSEM scripting environment	This replaces an existing project in the scripting environment without warning. If, at script conclusion, this is passed back to the interactive ProSEM session, then the project that was open in the interactive session prior to the script call will be replaced as well.
save_project(path=None)	Method	Save the project to a file	`prosem.save_project()` Saves the project in the ProSEM scripting environment to the specified file,	If no filepath/filename is given, the saved project is updates the project file that was loaded into the ProSEM scripting environment
add_image(path)	Method	Add an image file to the current project, or create a new project containing just one image.	`prosem.add_image("/home/dir/file.tif")` Loads this iamge into the project in the ProSEM scripting environment
add_folder(path)	Method	Add a folder of images to the current project, or create a new project containing images from a folder.	`prosem.add_folder("/home/dir/subdir/")` Load images in the specified folder into the project in the ProSEM scripting environment
load_recipe(path)	Method	Load a recipe from a file.	`prosem.load_recipe("/home/dir/example.mpr")` Loads the recipe into the project in the ProSEM scripting environment
save_recipe(path)	Method	Save the current recipe to a file.	`prosem.save_recipe("/home/dir/another.mpr")` Saves the recipe currently in the ProSEM scripting environment to the specified file.	Silently overwrites an existing file with the same path/name
selection	Attribute	Object selected in the project Images Panel	`type(prosem.selection)` ProSEMpy.GImage object `prosem.selection.label` 'MyFilename_21'	The object that was selected at the time the script was called. Could get an Image, a Group, or a stored Measurement
result_table_names	Attribute	A list of all Result Tables in the project	`prosem.result_table_names` ['Lines & Spaces', 'Shapes', 'Triangles']	Result Tables only exist in a project if there are stored objects of that feature type
group_table_names	Attribute	A list of all Group Tables in the project	`prosem.group_table_names` ['Lines & Spaces', 'Circles & Ellipses']	Group Tables only exist in a project if there are Gratings or Arrays of object of a specified data type. In this example, the project has both Line/Space Gratings and array of Circles/Ellipses
summary_table_names	Attribute	A list of all Summary Tables in a project	prosem.summary_table_names ['My Example Summary']	Summary Tables only exist if they have been created in a project
result_table(name)	Attribute	The full contents of the specified Result Table	`prosem.result_table("Circles & Ellipses")` [['Image', 'Group ID', 'Measurement ID', 'Validation', 'Center X[nm]', 'Center Y[nm]', 'Major Axis Direction[deg]', 'Major Diameter[nm]', ... ], ['Q3__Array_Hex', 'Group_1', 'M_1', 'Success', '495.7', '217.7', '0.00', '256.3', ... ]]	Returns a list of lists, where each subordinate list has the contents of each row in the Result Table, with the first list being the data column headers for that table.
group_table(name)	Attribute	The full contents of the specified Group Table	`prosem.group_table("Circles & Ellipses")` [['Image', 'Group ID', 'Col Vector X[nm]', 'Col Vector Y[nm]', 'Row Vector X[nm]', 'Row Vector Y[nm]', 'Radial Jitter[nm]', 'Col Jitter[nm]', 'Row Jitter[nm]', ... ], ['Q3__Array_Hex', 'Group_1', '452.9', '-2.8', '218.5', '390.0', '1.8', '1.5', '1.5', '6', ...]]	Returns a list of lists, where each subordinate list has the contents of each row in the Group Table, with the first list being the data column headers for that table.
summary_table(name)	Attribute	The full contents of the specified Summary Table	`prosem.summary_table(prosem.summary_table_names[0])` [['Image', 'N', 'Mean of CD Mean[nm]', 'StdDev of CD Mean[nm]'], ['A__Metal_Lines', '3', '239.9', '192.5'], ['C__Negative_Resist_Nanoscale', '3', '40.7', '0.5'], ['F__Grating_Etched_In_InP_238nm_period', '12', '112.0', '2.3']]	Returns a list of lists, where each subordinate list has the contents of each row in the Summary Table, with the first list being the data column headers for that table.

Image Properties, Functions, and Methods

Examples assume: prosem is a GProSEM object, and image is a GImage object within that project.

Name	Kind	Description	Example Example Result	Notes
len	Function	Count of Groups in the image	`len(prosem[0])` or `len(image)` 1	The image has one group of measurements.
CountX CountY	Attribute	Number of pixels in the image in X or Y	`prosem[0].CountX` or `image.CountY` 1280.0	Return value is type float
PixelSize	Writable Attribute	The pixel size of the image, in user units	`prosem[0].PixelSize` or `image.PixelSize` 1.325 `prosem[1].PixelSize=3.14159` The pixel size of the second image in the project is set to 3.14159 user units	The `MeasurementUnit` is a property of the project, described above. This is a writable attribute, so the pixel size of an image can be changed by assignment.
Rotation	Attribute	Rotation of the image	`prosem[0].Rotation` 7.0	Normally 0; is otherwise if the image has been rotated using the rotate method
SizeX SizeY	Attribute	The dimensions of the SEM image, in user units.	`prosem[0].SizeY` or `image.SizeX` 3996.875	This is computed for the total image, if a portion of the image is a data bar or border, that space will be included in this value, so the actual displayed image area may be less that this Size
label	Attribute	The Name of the image file in ProSEM	`prosem[0].label` My_Image_Name	This is set to the filename of the image, but with Python special characters replaced with underscores, so that this can be used as a property name. This label can also be changed in ProSEM Images panel, so it is not necessarily the name of the image file.
file	Attribute	The full file path and filename of the image file	`prosem[1].file or image.file` "/home/direc/imageFileName.tif"	Functions in the standard python OS.path library can be very helpful to parse this, for example to extract the filename and extension: `name,ext = os.path.splitext(os.path.split(image.file)[1])`
length	Attribute	Count of the number of groups in the image	`prosem[0].length` or `image.length` 2.0	This property is a float type
metadata	Attribute	A Python dictionary holding SEM metadata for the image, if it exists	`len(image.metadata)` 33 `image.metadata.keys()` ['MODE','SCALE','MAG','STAGEX','STAGEY'] `image.metadata['MAG']` '100000'	Metadata stored in or with SEM images depends completely on the SEM tool vendor and model. The first example uses the `len()` function to return how many metadata items have been read from the image. The second example uses the `keys()` method to return a list of the names of the metadata items available for this image. The third example returns the value of the metadata item named "MAG".
rotate(angle, copy)	Method	Rotates image by the given angle	`image.rotate(45,copy=0)` Rotates the image by 45 degrees, modifying the image in-place in ProSEM, not creating a copy.	The modified image is only within ProSEM; the image file is not modified by ProSEM. Angle is in degrees.
export_item(item, path, width, height, scale)	Method	Saves the measured image to a file, with overlays as displayed on the screen.	`prosem.export_item("/home/dir/mimage.png")`	Silently overwrites an existing file with the same path/name. Optional parameters: a single named parameter: "width=..." or "height=..." or "scale=...". If none, exported image is same resolution as original file.

Group Properties, Functions, and Methods

Examples assume: prosem is a GProSEM object, image is a GImage object within that project, and group is a GGroup object within that image.

The properties available depend on the type of group, a generic group of measurements, a grating (a group of adjacent line/space measurements), or an array (a group of 2-dimensional objects in a 2-dimensional layout).

Generic Groups

Name	Kind	Description	Example Example Result	Notes
len	Function	Count of measurements in the group	`len(prosem[0][1])` or `len(group)` 4	The group has four measurements. Return value is an integer
GroupID or label	Attribute	The name of the group	`prosem[1][1].label` 'Lines & Spaces' `image[0].GroupID`'Group_1'	Return value is a string. The two attributes return the same answer.
IsArray	Attribute	Is this group an Array?	`prosem[1][1].IsArray == True`False `group.IsArray == True`True	Test if the objects in this group have an array fit. If True, array fit parameters are available; see below.
IsGrating	Attribute	Is this group a Grating?	prosem[1][1].IsGrating == True True group.IsGrating == True False	Test if the objects in this group have a grating fit. If True, grating fit parameters are available; see below.
EdgeProfileFitQuality	Attribute	The average of the Edge Fit Quality score for measurements in this group	`group1.EdgeProfileFitQuality` 0.8794	The return value is a float between 0 and 1.0
FeatureFitQuality	Attribute	The average of the Feature Fit Quality score for measurements in this group	`prosem[3][1].FeatureFitQuality` 0.8998	The return value is a float between 0 and 1.0
image	Attribute	The GImage object which is the parent of this group	`type(group1.image)` <class 'ProSEMpy.GImage'> `group2.image.label` 'X2_Grat_0293'
length	Attribute	Count of the number of measurements in this group	`prosem[0][1].length` or `group.length` 8.0	This property is a float type
export_image(path, width, height, scale)	Method	Saves the measured image to a file, with overlays as displayed on the screen.	`prosem[1][3].export_image ("/home/dir/expimg.png")`	Silently overwrites an existing file with the same path/name. Optional parameters define width and height or scale factor from original

Grating Groups

Name Kind Description Example
Example Result Notes

Name	Kind	Description	Example Example Result	Notes
GratingPitchMean GratingPitchStdDev GratingPitchMin GratingPitchMax	Attribute	Statistics for Pitch measurements	`group1.GratingPitchMean` 221.6272 `group1.GratingPitchStdDev` 4.2867	Grating pitch is measured from each rising edge to the adjacent rising edge, and each falling edge to the adjacent falling edge
GratingLineMean GratingLineStdDev GratingLineMin GratingLineMax	Attribute	Statistics for Line measurements	`group1.GratingLineMin` 108.6492 `group1.GratingLineMax` 124.6146
GratingTrenchMean GratingTrenchStdDev GratingTrenchMin GratingTrenchMax	Attribute	Statistics for Line measurements	`prosem[0][1].length` or `group.length` 8.0	This property is a float type

GratingPitchMean
GratingPitchStdDev
GratingPitchMin
GratingPitchMax

Attribute

Statistics for Pitch measurements

group1.GratingPitchMean
221.6272

group1.GratingPitchStdDev
4.2867

Grating pitch is measured from each rising edge to the adjacent rising edge, and each falling edge to the adjacent falling edge

GratingLineMean
GratingLineStdDev
GratingLineMin
GratingLineMax

Attribute

Statistics for Line measurements

group1.GratingLineMin
108.6492

group1.GratingLineMax
124.6146

GratingTrenchMean
GratingTrenchStdDev
GratingTrenchMin
GratingTrenchMax

Attribute

Statistics for Line measurements

prosem[0][1].length or group.length

8.0

This property is a float type

Array Groups

Name	Kind	Description	Example Example Result	Notes
ColVectorX ColVectorY RowVectorX RowVectorY	Attribute	Vector Dimensions of a unit cell of the fitted array	`prosem[2][0].ColVectorX` 468.3544 `group3.ColVectorY` -0.1692	Grating pitch is measured from each rising edge to the adjacent rising edge, and each falling edge to the adjacent falling edge
ColJitter RowJitter RadialJitter	Attribute	Mean Jitter for elements in the group	`group1.GratingLineMin` 108.6492 `group1.GratingLineMax` 124.6146	Jitter is the distance of the object center from the fitted array point, given as components along the row and column vectors, as well as the radial distance from the fitted array point
MeanofArea StdDevofArea MeanofFittedArea StdDevofFittedArea	Attribute	Statistics for the enclosed area and fitted area for the shapes in the array	`group.MeanofFittedArea` 80024.7877 `group2.StdDevofFittedArea` 995.9376
MeanofBBoxHeight MeanofBBoxWidth	Attribute	Average dimensions of the measurement bounding box (extreme points)	`group.MeanofBBoxHeight` 323.2241	The shape BBox encloses all edge points in the measured shape, so these dimensions reveal the most outlying points in each dimension
MissingFeatures
MeanofMajorDiameter StdDevofMajorDiameter MeanofMinorDiameter StdDevofMinorDiameter MeanofAspectRatio StdDevofAspectRatio MeanofMajorAxisDirection StdDevofMajorAxisDirection	Attribute	Arrays of Circles and Ellipses Only Statistics for measured circles and ellipses in the array	`prosem[2][0].MeanofMajorDiameter` 324.5167 `group.StdDevofMinorDiameter` 2.3179
MeanofHeight StdDevofHeight MeanofWidth StdDevofWidth MeanofRotation StdDevofRotation	Attribute	Arrays of Rectangles Only Statistics for fitted rectangles in the array	`group.MeanofHeight` 85.3946
MeanofEdgeAngle1 MeanofEdgeAngle2 MeanofEdgeAngle3 MeanofEdgeLength1 MeanofEdgeLength2 MeanofEdgeLength3 MeanofInteriorAngle1 MeanofInteriorAngle2 MeanofInteriorAngle3 StdDevofEdgeAngle1 StdDevofEdgeAngle2 StdDevofEdgeAngle3 StdDevofEdgeLength1 StdDevofEdgeLength2 StdDevofEdgeLength3 StdDevofInteriorAngle1 StdDevofInteriorAngle2 StdDevofInteriorAngle3	Attribute	Arrays of Triangles Only Statistics for fitted triangles in the array	`group.MeanofEdgeAngle2` 120.748 `group.MeanofEdgeLength1` 127.5192

Measurement Properties, Functions, and Methods

Examples assume: prosem is a GProSEM object, image is a GImage object within that project, group is a GGroup object within that image, and meas is a stored measurement object within that group of one of the GMetrology... classes. (list above.)

The properties available depend on the object type of measurement.

Generic Measurement Properties & Methods for All Feature Types

These properties and methods apply to all of the individual Feature Types described below.

Name	Kind	Description	Example Example Result	Notes
group	Attribute	The group object this measurement belongs to	prosem[0][0][0].group <ProSEMpy.GGroup object at 0x0001C10> prosem[0][0][0].group.label 'Lines & Spaces'	Return value is a GGroup object, for the group that contains this measurement.
image	Attribute	The image object this measurement belongs to	prosem[1][1][0].image <ProSEMpy.GImage object at 0x008E0> prosem[0][0][0].image.label 'RJB112_CAL_Den_00_RelDos_1.0_25'	Return value is a GImage object, for the image that contains this measurement.
validationstate	Writable Attribute	Validation Status, one of: Validated Success Uncertain OutOfSpec Failure	`prosem[0][0][0].validationstate`'Validated' `meas.validationstate = 'OutOfSpec'` `meas.validationstate = 's'`	Return value is a string. When setting a value, the assignment is permissive; not case sensitive and can be shortened to the least ambiguous string, for example 's' --> 'Success'.
outline	Method	Access to all edge points in the measurement	`len(prosem[0][1][0].outline)` 565 `meas.outline(0)[53]` GPoint(x=20893.8461, y=28906.2499) `meas.outline(0)[30][0]` 20912.0801	For Line/Space measurements, a required parameter specifies which edge, 0 or 1. The Outline object can be subscripted to access an individual edge point, indexed from 0 to len-1. The Point object can be subscripted to access the X or Y coordinates, indexed 0 or 1, respectively.
label	Attribute	The name of the measurement ProSEM	`prosem[0][3][3].label` 'M_12'
EdgeProfileFitQuality	Attribute	Quality Score for how well edge fit method (e.g. Sigmoid) fit the edge signal	>>> a.EdgeProfileFitQuality 0.859699727905423	Quality Scores range from 0.0 to 1.0
FeatureFitQuality	Attribute	Quality Score for how well the measured edge points fit the chosen feature (e.g. Line, Circle, Rectangle)	>>> a.FeatureFitQuality 0.8815825050152745	Quality Scores range from 0.0 to 1.0
FeatureFindQuality	Attribute	Quality Score for how well the feature matches the template feature for a Find Similar or Batch Find operation	>>> a.FeatureFindQuality 0.9476200851558	Quality Scores range from 0.0 to 1.0
export_image(path, width, height, scale)	Method	Saves an image of the measurement ROI to a file, with overlays as displayed on the screen.	`prosem.export_image("/home/dir/another.mpr")`	Silently overwrites an existing file with the same path/name. Optional parameters specify size or scaling factor; otherwise defaults to the size of the ROI
distance_fitted_feature(a,b)	Method	Compute the shortest distance between the fitted features of two measurements.	`meas.distance_fitted_feature(meas1,meas2)` 8697.2506	Returns the nearest distance (in user units) between the fittted features of the two measurements given.
distance_nearest_points(a,b)	Method	Compute the distance between the closest points detected in two measurements.	`meas.distance_nearest_points(line1,prosem[0][4][0])` 26911.3008	Returns the nearest distance (in user units) between the closest measurement points of the two measurements given.
compute_cd(a, b, output)	Method	Compute the distance between two line measurements by averaging over line to point distances.		Optional 'output' argument determines the statistical property to return: "mean" (the default), "median", "min", "max", "range", "stddev", or "rms".
Input Parameters
LLX LLY URX URY	Attribute	Extents of the ROI containing this measurement.	`meas1.LLX` 15805.8011 `prosem[0][2][1].URX`27667.9224	X and Y coordinates of the Lower Left (LL) and Upper Right (UR) corners of the Region of Interest
AutoContrast	Attribute	Now obsolete		If autocontrast was enabled (now obsolete)
FilterType GaussX GaussY	Attribute	Image Pre-processing Filter Used, and parameters	>>> a.FilterType 'Gaussian' >>> a.GaussY 3.0	Filter Type values include: No Filter, Gaussian, Nagao-Matsuyama, Sym-Nearest-Neighbor, Median. The GaussX and GaussY properties only apply when the FilterType=Gaussian; for other types, the value is 'N.A.'
LineScanAvg	Attribute	Number of scan lines averaged during image preprocessing	Default is 0
EdgeMode	Attribute	Edge Finding method applied for this measurement	>>> a.EdgeMode 'Automatic'	All Feature Types: Automatic, Canny, and Slope Analysis Circle, Line/Space: Manual 2-D Shapes: Correlation
FineMode CdPos	Attribute	The edge fitting method used and the signal location on the edge used to define the edge point	>>> a.FineMode 'Sigmoidal Fit' >>> b.CdPos 'Mid'	The available values for fit mode depend on the chosen edge position. Top: Sigmoidal Fit, Parabolic Peak Mid: Sigmoidal Fit, Max Slope Bottom: Sigmoidal Fit, Regression To Baseline When Position is set to Custom Signal Level, the CdPos property as the signal level percentage FineMode = Threshold also used the defined CdPos value for the threshold
TwoPassMeasurement	Attribute	Did measurement use Two-Pass refinement?	>>> a.TwoPassMeasurement 'true'	currently: Line/Space only

Feature Type: Line/Space

A Line/Space Feature Type is defined as two edges, so there are some unique properties specific to each edge, as well as some properties that encompass both edges. The individual edges are addressed as E0 and E1, where E0 is the left or bottom edge, and E1 is the right or upper edge.

All of the Generic Measurement Properties and Methods apply.

Name	Contents	Example	Notes
CDMean CDMax CDMin CDMedian CDSampleCount CDStdDev	CD Measurement results. The Mean, Maximum, Minimum, Median, Standard Deviation, and Count of the individual CD measurements in the feature.	>>> a = prosem[0][0][0] >>> type(a) <class 'ProSEMpy.GMetrologyLinesSpaces'> >>> a.CDMean 454.35323761528554 >>> a.CDMax 467.6258203741299 >>> a.CDMin 440.6292427663147 >>> a.CDMedian 454.6255894352792 >>> a.CDSampleCount 414.0 >>> a.CDStdDev 4.098784105018094	In user units, nm or um All properties, including CDSampleCount, are type float.
CenterX CenterY	Geometric center of all edge points in both edges of the feature	>>> a.CenterX 354.5528935969964 >>> a.CenterY 1109.3749999999998	In user units, nm or um, with the origin at the image lower-left corner
E0Angle E1Angle	Geometric data about each edge in the Line/Trench feature: Angle with respect to horizontal X-Axis	>>> a.E0Angle 91.34492812027158 >>> a.E0CenterX 127.31920025701753 >>> a.E1CenterY 1109.3749999999998	In degrees, with respect to the horizontal axis, positive X = 0 degrees
E0CenterX E0CenterY E1CenterX E1CenterY	Geometric data about each edge in the Line/Trench feature: Geometric center of individual edges	>>> a.E0CenterX 127.31920025701753 >>> a.E1CenterY 1109.3749999999998	In user units, nm or um, with the origin at the image lower-left corner
EdgeProfileFitQuality E0EdgeProfileFitQuality E1EdgeProfileFitQuality	Edge fitting metrics, for the feature, and for each edge	>>> a.EdgeProfileFitQuality 0.8534856792067189 >>> a.E0EdgeProfileFitQuality 0.8176875278208273 >>> a.E1EdgeProfileFitQuality 0.8908510645286135	All quality metrics are between 0.0 and 1.0
FeatureFitQuality E0FeatureFitQuality E1FeatureFitQuality	Feature (Line) fitting metrics, for the feature, and for each edge	>>> a.FeatureFitQuality 0.6748587115624533 >>> a.E1FeatureFitQuality 0.7077239398207885	All quality metrics are between 0.0 and 1.0
E0FitErrorMean E0FitErrorStdDev E1FitErrorMean E1FitErrorStdDev	Mean and Standard Deviation of the edge fit errors for each edge	>>> a.E1FitErrorMean 2.6591640614579686 >>> a.E0FitErrorStdDev 3.1250565982400027	In user units, um or nm.
E0LER3StdDev E0LERCorrelationLengthXi E0LERRoughnessExponentAlpha E1LER3StdDev E1LERCorrelationLengthXi E1LERRoughnessExponentAlpha	Line Edge Roughness metrics for each edge in the Line/Trench feature	>>> a.E0LER3StdDev 12.080036496433232 >>> a.E1LERCorrelationLengthXi 161.44453060365498	In user units, nm or um Only available when LER has been measured for the feature
LWR3StdDev LWRCorrelationLengthXi LWRRoughnessExponentAlpha	Line Width Roughness metrics for the Line/Trench	>>> a.LWR3StdDev 18.19019677025889 >>> a.LWRRoughnessExponentAlpha 0.5406504529990777	In user units, nm or um Only available when LER has been measured for the feature

Feature Type: Circle/Ellipse

All of the Generic Measurement Properties and Methods apply.

Name	Contents	Example	Notes
MajorDiameter MinorDiameter AspectRatio	Circle/Ellipse Measurement results For a circle type, the Major and Minor axes are always equal, and Aspect Ratio = 1.0	>>> a = prosem[1][0][0] >>> type(a) <class 'ProSEMpy.GMetrologyEllipse'> >>> a.MajorDiameter 958.5284991107247 >>> a.MinorDiameter 328.82352213922826 >>> a.AspectRatio 0.3430503343868173	In user units, nm or um
MajorAxisDirection	Circle/Ellipse Measurement results: The angle of the major axis	>>> a.MajorAxisDirection 101.66074233425243	In degrees, with respect to the horizontal axis, positive X = 0 degrees
Area FittedArea	The area bounded by the traced shape, and by the fitted circle or ellipse shape	>>> a.Area 246190.5182436655 >>> a.FittedArea 247547.06877563742	In square user units, nm² or um²
CenterX CenterY	Center of the fitted circle/ellipse	>>> a.CenterX 3157.941292765046 >>> a.CenterY 2016.7030498969368	In user units, nm or um, with the origin at the image lower-left corner

Feature Type: Rectangle

All of the Generic Measurement Properties and Methods apply.

Name	Contents	Example	Notes
Height Width	Rectangle Measurement results: Height and Width of Fitted Rectangle	>>> a=prosem[0][0][0] >>> type(a) <class 'ProSEMpy.GMetrologyRectangle'> >>> a.Height 480.54718906715317 >>> a.Width 84.12596076536806	Height and Width are in user units.
Rotation	Rectangle Measurement results: Angle of Rotation of Long Axis from Vertical axis.	>>> a.Rotation 0.6922729212480065	Rotation is in degrees from vertical(!)
Area FittedArea	The area bounded by the traced shape, and by the fitted rectangle	>>> a.Area 40849.097132981515 >>> a.FittedArea 41269.201338132385	In square user units, nm² or um²
CenterX CenterY	Center of the fitted rectangle, in user units (nm or um), with the origin at the image lower-left corner	>>> a.CenterX 270.41439540606314 >>> a.CenterY 402.3612832633565	In user units, nm or um, with the origin at the image lower-left corner

Feature Type: Triangle

All of the Generic Measurement Properties and Methods apply.

Name	Contents	Example	Notes
EdgeLength1 EdgeLength2 EdgeLength3	Triangle Measurement results: The edge of the each of the three sides of the fitted triangle	>>> a=prosem[0][0][0] >>> type(a) <class 'ProSEMpy.GMetrologyTriangle'> >>> a.EdgeLength1 13711.514508481008 >>> a.EdgeLength2 8909.232705510165 >>> a.EdgeLength3 9019.998648724802	In user units, nm or um
InteriorAngle1 InteriorAngle2 InteriorAngle3	Triangle Measurement results: The interior angle of the each of the three sides of the fitted triangle	>>> a.InteriorAngle1 39.81726458344779 >>> a.InteriorAngle2 40.41372838861584 >>> a.InteriorAngle3 99.7690070279363	In degrees
EdgeAngle1 EdgeAngle2 EdgeAngle3	Triangle Measurement results: The angle of each of the three sides of the fitted triangle	>>> a.EdgeAngle1 99.71073400018037 >>> a.EdgeAngle2 59.297005611564536 >>> a.EdgeAngle3 139.52799858362818	In degrees, with respect to the horizontal axis, positive X = 0 degrees
Area Fitted Area	The area bounded by the traced shape, and by the fitted triangle	>>> a.Area 39578175.12639941 >>> a.FittedArea 39598007.29085007	In square user units, nm² or um²
CenterX CenterY	Center of the fitted triangle, in user units (nm or um), with the origin at the image lower-left corner	>>> a.CenterX 32136.763752177896 >>> a.CenterY 13283.806634587796	In user units, nm or um

Feature Type: Single Edge

All of the Generic Measurement Properties and Methods apply.

Name	Contents	Example	Notes
Angle	The angle of the fitted line of the Single Edge, with respect to the Horizontal Axis	>>> a=prosem[0][0][0] >>> type(a) <class 'ProSEMpy.GMetrologySingleEdge'> >>> a.Angle 89.53315277453993	In degrees, with respect to the horizontal axis, positive X = 0 degrees
CenterX CenterY	Center of the fitted single-line	>>> a.CenterX 17940.525351783628 >>> a.CenterY 35937.49999999999	In user units, nm or um, with the origin at the image lower-left corner
LER3StdDev LERCorrelationLengthXi LERRoughnessExponentAlpha	The Line Edge Roughness measurement results for the single edge	>>> a.LER3StdDev 45.62700395880039 >>> a.LERCorrelationLengthXi 4903.023650077894 >>> a.LERRoughnessExponentAlpha 1.0685997602219919	In user units, nm or um Only available when LER has been measured for the feature

Feature Type: Shape

All of the Generic Measurement Properties and Methods apply.

Name	Contents	Example	Notes
Area	The area bounded by the traced shape	>>> a=prosem[0][0][0] >>> type(a) <class 'ProSEMpy.GMetrologyShape'> >>> a.Area 105723936.58399628	In square user units, nm² or um²
CenterX CenterY	Center of the shape	>>> a.CenterX 51553.643647877434 >>> a.CenterY 15116.017041778632	In user units (nm or um), with the origin at the image lower-left corner

Feature Type: Multi-Edge

Multi-Edge is an Advanced Feature Type, with more complexity and capability than the basic feature types above. As the name "Multi-Edge" suggest, this feature can have any number of edges, with any number of measurements defined between the edges. In the data representation, a Multi-Edge feature appears as a Group of SingleEdge features.

For example, at the Group level, a Multi-Edge feature has type GMetrologyMultiEdge, and the size of the group is the number of edges defined within that Multi-Edge feature. Since Multi-Edge measurements are defined as ProSEM variables, they are accessed as properties of the measurement. The compute_cd method can also be used to report the cd between any two edges in a feature.

>>> type(prosem[0][0])
<class 'ProSEMpy.GMetrologyMultiEdge'>
>>> type(prosem[0][0][0])
<class 'ProSEMpy.GMetrologySingleEdge'>
>>> len(prosem[0][0])
3

>>> prosem[0][0].SourceToGate
346.54015736912385
>>> prosem[0][0].GateWidth
440.4669029693961
>>> prosem[0][0][0].GateWidth
440.4669029693961

>>> prosem[0][0][0].compute_cd(prosem[0][0][0],prosem[0][0][1])
346.54015736912385

All of the Generic Measurement Properties and Methods apply.

Name	Contents	Example	Notes
Angle	The angle of the fitted line of the Single Edge, with respect to the Horizontal Axis	>>> a=prosem[0][0][0] >>> type(a) <class 'ProSEMpy.GMetrologySingleEdge'> >>> a.Angle 89.53315277453993	In degrees, with respect to the horizontal axis, positive X = 0 degrees
CenterX CenterY	Center of the fitted single-line	>>> a.CenterX 17940.525351783628 >>> a.CenterY 35937.49999999999	In user units, nm or um, with the origin at the image lower-left corner
LER3StdDev LERCorrelationLengthXi LERRoughnessExponentAlpha	The Line Edge Roughness measurement results for the single edge	>>> a.LER3StdDev 45.62700395880039 >>> a.LERCorrelationLengthXi 4903.023650077894 >>> a.LERRoughnessExponentAlpha 1.0685997602219919	In user units, nm or um Only available when LER has been measured for the feature

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