ProSEM Features

ProSEM Features include:

Automated Edge Finding Algorithms

  • Sigmoidal Fit
  • Maximum Derivative
  • Signal Peak
  • Baseline Regression
  • Threshold


  • SEM Image
  • 1-D Cross-section Plots
  • Measurement results overlaid
  • Power Spectral Density (PSD)

Pixel Size Calibration (Image Scaling) by

  • SEM meta-data
  • SEM scale bar
  • Grating period measurement
  • Manual

Feature Types

  • Line / Trench
  • Pillar / Hole
  • Circle
  • Ellipse
  • Rectangle
  • Triangle
  • 1-Dimensional Gratings of Lines & Spaces, with Grating Fit parameters
  • 2-Dimensional Arrays of Circles, Ellipses, Rectangles, Triangles, Arbitrary Shapes
  • Rectangular or Hexagonal Arrays fitted with array lattice parameters reported

Multiple Features in an Image

  • Define and Measure Unlimited Features in an Image
  • Same Feature Type or Mixed Feature Types
  • Automatically Find all Similar Features in an Image
  • Automatically Measure a full set of Images with Similar Features
  • User-defined Fences allow segmenting and finding only in specific regions of an image

User Variables and Formulas

  • Define variables
  • Set values for each measurement, group, image, or project
  • Define formulas to compute values
  • Formulas using measure shape properties, such as: Aspect Ratio, Sidewall Slope, Ellipticity
  • Formulas between measured shapes:  Feature Spacing, Fill Fraction
  • Formulas between groups of measurements: Pattern Stitching or Overlay
  • Extract values from Filenames

Recipes and Batch Mode

  • Define, Apply, Export, or Import Recipes
  • Recipes contain all measurement settings, variables, formulas, and defined summaries
  • Import and Apply to new Projects for Batch Measurements

Line Edge Roughness

  • 3-Sigma LER
  • Power Spectral Density (PSD) Plot
  • Correlation Length
  • Roughness Exponent
  • Multi-taper Segment Averaging

Data Handling

  • Results in table format, with all input settings
  • User Variables
  • Export measurements to CSV
  • Summarize data by any user-variable or attribute
  • Data Filtering for Outlier Removal
  • Export edge points and fitted shapes to CSV or GDS-II formats

Python Scripting

  • Complete Python 3 instance included; no installation necessary
  • Many common libraries included, such as:
    • Plotting with MATPLOTLIB
    • Numerical Processing with NUMPY
    • Custom Data Export in CSV, HTML, or Excel formats
  • Example script uses include:
    • Plotting Measurement Data
    • Generating Customer Export Files
    • Report Generation
    • Applying Measurement Specifications

Complex Contours and Cross-Sections

  • Measure complex shapes with varying edges; each edge can have independent sampling, edge fitting, and shape fitting
  • Multiple measurements in each ROI
  • Measure cross-section images such as resist or etch profiles
  • An optional add-on feature as of Version 3

Platform Support

  • Windows:  10, 64-bit
  • Redhat/Centos Linux:  7 or 8, 64-bit
  • Ubuntu Linux: 18.04 or 20.04, 64-bit
User Interface Features:
Edge Detection & Fitting Methods:
Feature Types:
Feature Finding:
Recipes and Batch Measurements:
Measurement Data Handling:
Formulas and Advanced Computations:
Line Edge Roughness / Power Spectral Density:
Python Scripting:
Advanced Contours: